High voltage pulse discharge for ion treatment of metals
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1429785
Reference3 articles.
1. The use of a high-voltage discharge at low pressure for 3D ion implantation
2. Measurement of electron emission due to energetic ion bombardment in plasma source ion implantation
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