Microdischarge devices with 10 or 30μm square silicon cathode cavities: pd scaling and production of the XeO excimer
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1825061
Reference9 articles.
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3. High-pressure micro-discharges in etching and deposition applications
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