High-pressure micro-discharges in etching and deposition applications
Author:
Publisher
IOP Publishing
Subject
Surfaces, Coatings and Films,Acoustics and Ultrasonics,Condensed Matter Physics,Electronic, Optical and Magnetic Materials
Link
http://stacks.iop.org/0022-3727/36/i=23/a=008/pdf
Reference21 articles.
1. Microhollow cathode discharges
2. The temporal development of hollow cathode discharges
3. Die Stromdichte des normalen Kathodenfalles
4. High-pressure hollow cathode discharges
5. Direct current glow discharges in atmospheric air
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