Direct current microhollow cathode discharges on silicon devices operating in argon and helium-Reference-Cited by-同舟云学术

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Direct current microhollow cathode discharges on silicon devices operating in argon and helium

Published:2018-02-06 Issue:2 Volume:27 Page:025005
ISSN:1361-6595
Container-title:Plasma Sources Science and Technology
language:
Short-container-title:Plasma Sources Sci. Technol.

Author:

Michaud R^ORCID,Felix V,Stolz A,Aubry O,Lefaucheux P,Dzikowski S,Schulz-von der Gathen V^ORCID,Overzet L J,Dussart R^ORCID

Publisher

IOP Publishing

Subject

Condensed Matter Physics

Link

http://iopscience.iop.org/article/10.1088/1361-6595/aaa870/pdf

Reference22 articles.

1. Microhollow cathode discharges

2. Microhollow cathode discharges

3. Effect of limiting the cathode surface on direct current microhollow cathode discharge in helium

4. High-pressure hollow cathode discharges

5. Predicted properties of microhollow cathode discharges in xenon

Cited by 11 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. In silico monitoring of non-reactive gas blistering on crystalline substrates;International Journal of Mechanical Sciences;2024-11

2. Numerical simulation and experimental diagnostics of fast electron kinetics and plasma parameters in a microhollow cathode discharges in helium;Plasma Sources Science and Technology;2023-11-01

3. Conventional and non-conventional diagnostics of a stable atmospheric pressure DC normal glow microplasma discharge intended for in situ TEM studies;Plasma Sources Science and Technology;2022-03-01

4. Silicon nanowires: the promoter of performance improvement of microplasma in a microcavity array device;Plasma Sources Science and Technology;2021-02-01

5. Diagnostics and comparative analyzes of plasma parameters in micro hollow cathode discharges with an open and covered external surface of cathode in helium using an additional electrode;Plasma Sources Science and Technology;2021-01-01

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