Generation of soft x rays using a rare gas‐hydrogen plasma focus and its application to x‐ray lithography
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.96743
Reference8 articles.
1. Determination of wavelength and excitation voltage for X-ray lithography
2. Solid state: X-ray lithography breaks the submicrometer barrier; A new X-ray lithography system allowed Bell Labs engineers to make the smallest, fastest MOSFETs yet reported
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