The kinetics and mechanism of scanned probe oxidation of Si
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.126166
Reference16 articles.
1. Modification of hydrogen‐passivated silicon by a scanning tunneling microscope operating in air
2. Role of space charge in scanned probe oxidation
3. Fabrication of Si nanostructures with an atomic force microscope
4. High speed patterning of a metal silicide using scanned probe lithography
5. Fabrication of 0.1 μm metal oxide semiconductor field‐effect transistors with the atomic force microscope
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