Anisotropic Effects in Local Anodic Oxidation Nanolithography on Silicon Surfaces: Insights from ReaxFF Molecular Dynamics
Author:
Affiliation:
1. Centre for Precision Manufacturing, Department of Design, Manufacturing and Engineering Management, University of Strathclyde, Glasgow G1 1XJ, U.K.
Funder
Engineering and Physical Sciences Research Council
Royal Society
UK Research and Innovation
Publisher
American Chemical Society (ACS)
Link
https://pubs.acs.org/doi/pdf/10.1021/acs.langmuir.4c01129
Reference90 articles.
1. Ionic Liquid‐Mediated Scanning Probe Electro‐Oxidative Lithography as a Novel Tool for Engineering Functional Oxide Micro‐ and Nano‐Architectures
2. Nanoscale electrostatic control in ultraclean van der Waals heterostructures by local anodic oxidation of graphite gates
3. Controllable Formation of Nanoscale Patterns on TiO2 by Conductive-AFM Nanolithography
4. Conductive AFM Patterning on Oligo(ethylene glycol)-Terminated Alkyl Monolayers on Silicon Substrates: Proposed Mechanism and Fabrication of Avidin Patterns
5. Precise Positioning of Lubricant on a Surface Using the Local Anodic Oxide Method
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