Ionic Liquid‐Mediated Scanning Probe Electro‐Oxidative Lithography as a Novel Tool for Engineering Functional Oxide Micro‐ and Nano‐Architectures

Abstract

AbstractFunctional oxides have extensively been investigated as a promising class of materials in a broad range of innovative applications. Harnessing the novel properties of functional oxides in micro‐ to nano‐scale applications hinges on establishing advanced fabrication and manufacturing techniques able to synthesize these materials in an accurate and reliable manner. Oxidative scanning probe lithography (o‐SPL), an atomic force microscopy (AFM) technique based on anodic oxidation at the water meniscus formed at the tip/substrate contact, not only combines the advantages of both “top‐down” and “bottom‐up” fabrication approaches, but also offers the possibility of fabricating oxide nanomaterials with high patterning accuracy. While the use of self‐assembled monolayers (SAMs) broadened the application of o‐SPL, significant challenges have emerged owing to the relatively limited number of SAM/solid surface combinations that can be employed for o‐SPL, which constrains the ability to control the chemistry and structure of oxides formed by o‐SPL. In this work, a new o‐SPL technique that utilizes room‐temperature ionic liquids (RTILs) as the functionalizing material to mediate the electrochemistry at AFM tip/substrate contacts is reported. The results show that the new IL‐mediated o‐SPL (IL‐o‐SPL) approach allows sub‐100 nm oxide features to be patterned on a model solid surface, namely steel, with an initiation voltage as low as −2 V. Moreover, this approach enables high tunability of both the chemical state and morphology of the patterned iron oxide structures. Owing to the high chemical compatibility of ILs, which derives from the possibility of synthesizing ILs able to adsorb on a wide variety of solid surfaces, IL‐o‐SPL can be extended to other material surfaces and provide the opportunity to accurately tailor the chemistry, morphology, and electronic properties within nanoscale domains, thus opening new pathways to the development of novel micro‐ and nano‐architectures for advanced integrated devices.