High speed patterning of a metal silicide using scanned probe lithography
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.124730
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1. Modification of hydrogen‐passivated silicon by a scanning tunneling microscope operating in air
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3. Fabrication of 0.1 μm metal oxide semiconductor field‐effect transistors with the atomic force microscope
4. Room temperature operation of a single electron transistor made by the scanning tunneling microscope nanooxidation process for the TiOx/Ti system
5. Fabrication of submicron suspended structures by laser and atomic force microscopy lithography on aluminum combined with reactive ion etching
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