Measurement of atomic indium during metalorganic chemical vapor deposition
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.345644
Reference7 articles.
1. THE PYROLYSIS OF TRIMETHYLINDIUM
2. The mechanism of the growth of InP by MOCVD: An investigation of the pyrolyses of some group III metal-organics
3. The mechanism of the growth of InP by MOCVD: A flow-tube investigation of the pyrolysis of the indium precursor
4. Decomposition kinetics of OMVPE precursors
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