Hydrogen annealing of arrays of planar and vertically stacked Si nanowires-Reference-Cited by-同舟云学术

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Hydrogen annealing of arrays of planar and vertically stacked Si nanowires

Published:2007-12-03 Issue:23 Volume:91 Page:233502
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Dornel E.,Ernst T.,Barbé J. C.,Hartmann J. M.,Delaye V.,Aussenac F.,Vizioz C.,Borel S.,Maffini-Alvaro V.,Isheden C.,Foucher J.

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.2818678

Reference14 articles.

1. Low thermal budget surface preparation of Si and SiGe

2. Agglomeration control during the selective epitaxial growth of Si raised sources and drains on ultra-thin silicon-on-insulator substrates

3. Proceedings of IEEE SOI Conference;Widodo L.,2005

4. Orientation-Dependent Dewetting of Patterned Thin Si Film on SiO2

5. Surface diffusion dewetting of thin solid films: Numerical method and application toSi∕SiO2

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