1. Key Laboratory of Microelectronics Devices & Integrated Technology, Institute of Microelectronics, Chinese Academy of Sciences, Beijing 100029, P. R. China
2. Microelectronics Institute, University of Chinese Academy of Sciences, Beijing 100049, P. R. China
3. Beijing Superstring Academy of Memory Technology, Beijing 100176, P. R. China
4. Research and Development Center of Optoelectronic Hybrid IC, Guangdong Greater Bay Area Institute of Integrated Circuit and System, Guangdong 510535, P. R. China
5. Hefei National Laboratory, University of Science and Technology of China, Hefei, Anhui 230088, P. R. China