Analysis of piezo actuators in translation constructions
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1145552
Reference7 articles.
1. Using capacitive sensors for in situ calibration of displacements in a piezo-driven translation stage of an STM
2. Piezoelectric ceramic displacement characteristics at low frequencies and their consequences in Fabry-Perot interferometry
3. Calibration and characterization of piezoelectric elements as used in scanning tunneling microscopy
4. Deformations and nonlinearity in scanning tunneling microscope images
5. Effect of PZT and PMN actuator hysteresis and creep on nanoindentation measurements using force microscopy
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