Using capacitive sensors for in situ calibration of displacements in a piezo-driven translation stage of an STM-Reference-Cited by-同舟云学术

Using capacitive sensors for in situ calibration of displacements in a piezo-driven translation stage of an STM

Published:1993-03 Issue:1 Volume:36 Page:37-42
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Holman A.E.,Heerens W.Chr.,Tuinstra F.

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

Reference6 articles.

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3. High temperature scanning tunneling microscope;Watanabe;J. Vac. Sci. Technol. A,1990

4. Application of capacitance techniques in sensor design, review article;Heerens;J. Phys. E: Sci. Instrum.,1986

5. Deformations and nonlinearity in scanning tunneling microscope images;Libioulle;J. Vac. Sci. Technol. B,1991

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