Large etch-selectivity enhancement in the epitaxial liftoff of single-crystal LiNbO3 films
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.124115
Reference12 articles.
1. Fabrication of single-crystal lithium niobate films by crystal ion slicing
2. Epitaxial liftoff of thin oxide layers: Yttrium iron garnets onto GaAs
3. Linear electro‐optic effect in sputtered polycrystalline LiNbO3films
4. Deposition and analysis of lithium niobate and other lithium niobium oxides by rf magnetron sputtering
5. Surface stresses in ion−implanted steel
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