UV nanoimprint lithography for the realization of large-area ordered SiGe/Si(001) island arrays
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3575554
Reference29 articles.
1. Imprint Lithography with 25-Nanometer Resolution
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