Damage in hydrogen plasma implanted silicon
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1389073
Reference9 articles.
1. Plasma immersion ion implantation—a fledgling technique for semiconductor processing
2. Low pressure plasma immersion ion implantation of silicon
3. Instrumental and process considerations for the fabrication of silicon-on-insulators (SOI) structures by plasma immersion ion implantation
4. A detailed physical model for ion implant induced damage in silicon
5. Monte Carlo simulation of silicon amorphization during ion implantation
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