Structural Properties of Silicon Implanted with Unfiltered Boron Plasma Ions
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Published:2018-12-12
Issue:12
Volume:13
Page:1793-1796
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ISSN:1555-130X
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Container-title:Journal of Nanoelectronics and Optoelectronics
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language:en
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Short-container-title:Journal of Nanoelectronics and Optoelectronics
Author:
Park Hyomin,Park Sungeun,Park Se Jin,Kang Yoonmook,Lee Hae-Seok,Kim Donghwan
Publisher
American Scientific Publishers
Subject
Electrical and Electronic Engineering,Electronic, Optical and Magnetic Materials