Electron beam-generated Ar/N2 plasmas: The effect of nitrogen addition on the brightest argon emission lines
Author:
Affiliation:
1. Materials Science Division, U.S. Naval Research Laboratory, Washington, DC 20375, USA
2. Plasma Physics Division, U.S. Naval Research Laboratory, Washington, DC 20375, USA
Funder
Naval Research Laboratory Base Program
Publisher
AIP Publishing
Subject
Condensed Matter Physics
Link
http://aip.scitation.org/doi/pdf/10.1063/1.4946880
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1. Ionized physical vapor deposition of titanium nitride: A global plasma model
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