Modeling two-dimensional solid-phase epitaxial regrowth using level set methods
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3082086
Reference48 articles.
1. Ultra low energy (100–2000 eV) boron implantation into crystalline and silicon-preamorphized silicon
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4. Kinetics of solid phase crystallization in amorphous silicon
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