Enhanced electrical properties of atomic layer deposited La2O3 thin films with embedded ZrO2 nanocrystals
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.3009202
Reference7 articles.
1. Pushing the Limits
2. Embedded thin film capacitors-theoretical limits
3. Evidence and Understanding of ALD<tex>$hbox HfO_2hbox --hbox Al_2hbox O_3$</tex>Laminate MIM Capacitors Outperforming Sandwich Counterparts
4. Spontaneous nanoclustering of ZrO2 in atomic layer deposited LayZr1−yOx thin films
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