Direct observation of Si lattice strain and its distribution in the Si(001)–SiO2 interface transition layer
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.120373
Reference15 articles.
1. Si→SiO2transformation: Interfacial structure and mechanism
2. Evaluation ofSiO2/(001)Si interface roughness using high-resolution transmission electron microscopy and simulation
3. Microscopic structure of theSiO2/Si interface
4. Periodic Changes in $\bf SiO_{2}/Si(111)$ Interface Structures with Progress of Thermal Oxidation
5. Use of Thin Si Crystals in Backscattering-Channeling Studies of the Si-SiO2Interface
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