1. CNR—Institute for Microelectronics and Microsystems (CNR-IMM), Unit of Agrate Brianza, 20864 Agrate Brianza (MB), Italy
2. Dipartimento di Scienza dei Materiali, Università degli Studi di Milano-Bicocca, 20125 Milano, Italy
3. Department of Sciences and Methods for Engineering, University of Modena and Reggio Emilia, 42122 Reggio Emilia, Italy
4. Applied Materials—MDLx Italy R&D, 42122 Reggio Emilia, Italy