PIC-MCC∕Fluid Hybrid Model for Low Pressure Capacitively Coupled O[sub 2] Plasma-Reference-Cited by-同舟云学术

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PIC-MCC∕Fluid Hybrid Model for Low Pressure Capacitively Coupled O[sub 2] Plasma

Published:2011 Issue: Volume: Page:
ISSN:0094-243X
Container-title:AIP Conference Proceedings
language:
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Author:

Bera Kallol,Rauf Shahid,Collins Ken

Publisher

AIP

Cited by 6 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Influence of External Input Parameters on Species Production in a Dual-Frequency Capacitively Coupled Radio-frequency Oxygen Plasma;Arabian Journal for Science and Engineering;2019-09-18

2. Spatial structure of radio-frequency capacitive discharge plasma with ring-shaped hollow electrode using Ar and O2 mixture gases;Journal of Physics D: Applied Physics;2019-07-03

3. The Influence of Secondary Electron Emission and Electron Reflection on a Capacitively Coupled Oxygen Discharge;Atoms;2018-11-28

4. On the role of metastable states in low pressure oxygen discharges;AIP Conference Proceedings;2017

5. A particle-in-cell/Monte Carlo simulation of a capacitively coupled chlorine discharge;Plasma Sources Science and Technology;2013-09-27

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