A particle-in-cell/Monte Carlo simulation of a capacitively coupled chlorine discharge
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Published:2013-09-27
Issue:5
Volume:22
Page:055020
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ISSN:0963-0252
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Container-title:Plasma Sources Science and Technology
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language:
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Short-container-title:Plasma Sources Sci. Technol.
Author:
Huang Shuo,
Gudmundsson J TORCID
Subject
Condensed Matter Physics
Cited by
29 articles.
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