Analysis of low pressure rf glow discharges using a continuum model
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.346277
Reference13 articles.
1. Self‐consistent simulation of a parallel‐plate rf discharge
2. A Continuum Model of DC and RF Discharges
3. Fluid model simulations of a 13.56‐MHz rf discharge: Time and space dependence of rates of electron impact excitation
4. Continuum modeling of argon radio frequency glow discharges
5. A staggered-mesh finite-difference numerical method for solving the transport equations in low pressure rf glow discharges
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