Influence of External Input Parameters on Species Production in a Dual-Frequency Capacitively Coupled Radio-frequency Oxygen Plasma
Author:
Publisher
Springer Science and Business Media LLC
Subject
Multidisciplinary
Link
http://link.springer.com/content/pdf/10.1007/s13369-019-04113-0.pdf
Reference37 articles.
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3. Lu, Y.; Yan, D.; Chen, Y.: 2-D fluid simulation of dual-frequency capacitively coupled plasma. J. Hydrodyn. Ser. B 21(6), 814–819 (2009)
4. Popović, S.; Rašković, M.; Kuo, S.P.; Vušković, L.: Reactive oxygen emission from microwave discharge plasmas. J. Phys. Conf. Ser. 86, 012013 (2007)
5. Gudmundsson, J.T.; Marakhtanov, A.M.; Patel, K.K.; Gopinath, V.P.; Lieberman, M.A.: On the plasma parameters of a planar inductive oxygen discharge. J. Phys. D Appl. Phys. 33, 1323–1331 (2000)
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1. Numerical simulation of the argon dielectric barrier discharge driven by dual frequency at atmospheric pressure;AIP Advances;2023-06-01
2. Numerical Investigation of Reactive Species Generation in $$He/O_2$$ Admixture Capacitively Coupled Plasma;Arabian Journal for Science and Engineering;2020-10-01
3. One-Dimensional Numerical Simulation of a Capacitively Coupled Oxygen Plasma Driven by a Dual Frequency Generator at Low Temperature;ICREEC 2019;2020
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