Electron kinetics in capacitively coupled plasmas modulated by electron injection-Reference-Cited by-同舟云学术

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Electron kinetics in capacitively coupled plasmas modulated by electron injection

Published:2017-09-14 Issue:10 Volume:122 Page:103301
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Zhang Ya¹^ORCID,Peng Yanli²^ORCID,Innocenti Maria Elena³,Jiang Wei²³,Wang Hong-yu⁴,Lapenta Giovanni³

Affiliation:

1. Department of Physics, Wuhan University of Technology, Wuhan 430070, China

2. School of Physics, Huazhong University of Science and Technology, Wuhan 430074, China

3. Centre for Mathematical Plasma-Astrophysics, Department of Mathematics, University of Leuven, Leuven 3001, Belgium

4. School of Physics Science and Technology, Anshan Normal University, Anshan 114007, China

Funder

National Natural Science Foundation of China (NSFC)

Fonds Wetenschappelijk Onderzoek (FWO)

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.5001892

Reference37 articles.

1. Production of large-area plasmas by electron beams

2. Theoretical overview of the large-area plasma processing system (LAPPS)

3. Review of plasma catalysis on hydrocarbon reforming for hydrogen production—Interaction, integration, and prospects

4. Test particle simulation of the role of ballistic electrons in hybrid dc/rf capacitively coupled plasmas in argon

5. Heating mechanisms and particle flow balancing of capacitively coupled plasmas driven by combined dc/rf sources

Cited by 10 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Numerical characterization of dual-frequency capacitively coupled plasmas modulated by electron beam injection;Physica Scripta;2024-01-17

2. A novel capacitively coupled plasma driven by hollow cathode radio-frequency discharges;Physica Scripta;2023-02-20

3. Effect of an electron beam on a dual-frequency capacitive rf plasma: experiment and simulation ^*;Plasma Sources Science and Technology;2022-08-30

4. Computational study of microdischarges driven by electron beam injection with particle-in-cell/Monte Carlo collision simulations;Journal of Applied Physics;2022-04-28

5. Numerical characterization of capacitively coupled plasmas modulated by ion beam injection;Plasma Sources Science and Technology;2022-04-01

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