Structural, electrical, and optical properties of transparent gallium oxide thin films grown by plasma-enhanced atomic layer deposition
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1980535
Reference17 articles.
1. Stability of semiconducting gallium oxide thin films
2. Transparent conductors—A status review
3. Transparent conductors—A status review
4. SrTa2O6Thin Films Deposited by Plasma-Enhanced Atomic Layer Deposition
5. Electrical Properties of Dielectric and Ferroelectric Films Prepared by Plasma Enhanced Atomic Layer Deposition
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