Liquid‐jet target for laser‐plasma soft x‐ray generation
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1147561
Reference11 articles.
1. Atomic-number dependence of soft-x-ray emission from various targets irradiated by a 0.53-μm-wavelength laser
2. Scanning x‐ray microscopy using a laser‐plasma source
3. Performance optimization of a high-repetition-rate KrF laser plasma x-ray source for microlithography
4. Plasma x‐ray source for lithography generated by a ≊30 J, 30 ns KrF laser
5. Droplet target for low-debris laser-plasma soft X-ray generation
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