Plasma x‐ray source for lithography generated by a ≊30 J, 30 ns KrF laser
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.99919
Reference8 articles.
1. X-ray lithography
2. X‐ray yields of plasmas heated by 8‐nsec neodymium laser pulses
3. X-ray lithography using a KrF laser-plasma source at hν ≈ 1 keV
4. Phase conjugation of KrF laser radiation
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1. Emission spectrum of hard x-rays, generated from iron, copper, and molybdenum targets by subpicosecond KrF laser pulses;Applied Physics Letters;2001-02-26
2. Particle dynamics of debris produced during laser–plasma soft x-ray generation;Journal of Applied Physics;2001-01-15
3. Generation of hard x rays by ultrafast terawatt lasers;Review of Scientific Instruments;2001-01
4. Laser and target experiments on KrF GARPUN laser installation at FIAN;Laser and Particle Beams;1999-01
5. X-ray emission from plasmas formed using an excimer laser with various pulse lengths;Journal of Physics D: Applied Physics;1998-10-21
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