Observation of photoelectric-induced microplasma avalanche breakdown in AlGaN ultraviolet photodiode with separate absorption and multiplication structure

Abstract

Amplification of weak ultraviolet signals has always been a challenging issue to design and fabricate high-performance ultraviolet photodetectors. Here, we observe a distinctive microplasma breakdown behavior in AlGaN-based ultraviolet avalanche photodiodes with artificial mesa architecture. At 107 V breakdown voltage, the photocurrent increases sharply whereas dark current intriguingly remains at the extremely low level of 0.1 nA as the applied voltage increases. Simultaneously, a significant blue luminescence phenomenon is observed at the mesa edge of photodiode at breakdown voltage, indicating the occurrence of microplasma breakdown. Ultimately, the microplasma avalanche photodiode achieves a record-high avalanche gain of 3 × 106 with light–dark current ratio readily exceeding 107. Kelvin probe force microscopy was employed to reveal the physical mechanism of localized avalanche breakdown induced by photoelectric effects and elaborate the microplasma discharge process, which is related to surface states. The unprecedented detection mode of photocurrent triggering avalanche events while remaining low dark current is anticipated to effectively shield the background noise and amplify ultraviolet signals. It is worth further research to explore its possibility on high-sensitivity ultraviolet photodetection.