Observation of radio‐frequency discharges at various driving frequencies
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.353116
Reference22 articles.
1. Electron heating mechanisms in helium rf glow discharges: A self-consistent kinetic calculation
2. Modeling of a rf glow discharge plasma
3. Power dissipation in capacitively coupled rf discharges
4. Pressure and frequency dependence of ion bombardment energy distributions from rf discharges
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