Author:
Mertens P. W.,Wouters D. J.,Maes H. E.,De Veirman A.,Van Landuyt J.
Subject
General Physics and Astronomy
Cited by
16 articles.
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1. Soi Materials;Silicon-on-Insulator Technology: Materials to VLSI;2004
2. SOI Materials;Silicon-on-Insulator Technology: Materials to VLSI;1997
3. Silicon on insulator-an emerging high-leverage technology;IEEE Transactions on Components, Packaging, and Manufacturing Technology: Part A;1995-03
4. Incorporation of nitrogen in Si3N4‐capped silicon by cw Ar+‐laser melting;Journal of Applied Physics;1993-10-15
5. Reactive Ion Etching of SOI (SIMOX and ZMR) Silicon in Nitrogen Containing CF 4 + O 2 and SF 6 + O 2 Plasmas;Journal of The Electrochemical Society;1993-09-01