Interaction of TiSi2layers with polycrystalline Si
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.96715
Reference8 articles.
1. Refractory metal silicides: Thin-film properties and processing technology
2. Interaction of Al layers with polycrystalline Si
3. Interaction of metal layers with polycrystalline Si
4. Resistivities of Thin Film Transition Metal Silicides
5. Recrystallization processes in polycrystalline silicon
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