Force-balancing microforce sensor with an optical-fiber interferometer
Author:
Publisher
AIP Publishing
Subject
Instrumentation
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1148171
Reference8 articles.
1. Atomic Force Microscope
2. Forces in atomic force microscopy in air and water
3. Atomic force microscopy of polymeric liquid films
4. A new force sensor incorporating force‐feedback control for interfacial force microscopy
5. Surface force measurements on picometer and piconewton scales
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3. A preliminary investigation of the potential mechanical sensitivity of vertical comb drives;Journal of Micromechanics and Microengineering;2014-09-22
4. A thin film micro-force sensor using double concentric circle optical fibre;Transactions of the Institute of Measurement and Control;2012-07-20
5. Nanoforce estimation based on Kalman filtering and applied to a force sensor using diamagnetic levitation;Sensors and Actuators A: Physical;2012-06
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