Nanoforce estimation based on Kalman filtering and applied to a force sensor using diamagnetic levitation-Reference-Cited by-同舟云学术

Nanoforce estimation based on Kalman filtering and applied to a force sensor using diamagnetic levitation

Published:2012-06 Issue: Volume:179 Page:223-236
ISSN:0924-4247
Container-title:Sensors and Actuators A: Physical
language:en
Short-container-title:Sensors and Actuators A: Physical

Author:

Piat Emmanuel,Abadie Joël,Oster Stéphane

Publisher

Elsevier BV

Subject

Electrical and Electronic Engineering,Metals and Alloys,Surfaces, Coatings and Films,Condensed Matter Physics,Instrumentation,Electronic, Optical and Magnetic Materials

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5. A six-axis MEMS force–torque sensor with micro-newton and nano-newtonmeter resolution;Beyeler;Journal of Microelectromechanical Systems,2009

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