Fabrication of 100nm metal lines on flexible plastic substrate using ultraviolet curing nanoimprint lithography
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.2193653
Reference11 articles.
1. Nanoimprint Lithography for Hybrid Plastic Electronics
2. Imprint lithography for flexible transparent plastic substrates
3. UV Embossing of Sub-micrometer Patterns on Biocompatible Polymeric Films Using a Focused Ion Beam Fabricated TiN Mold
4. Imprint of sub‐25 nm vias and trenches in polymers
5. Imprint lithography with sub-10 nm feature size and high throughput
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