UV Embossing of Sub-micrometer Patterns on Biocompatible Polymeric Films Using a Focused Ion Beam Fabricated TiN Mold

Author:

Gao J. X.1,Chan-Park M. B.1,Xie D. Z.1,Yan Y. H.1,Zhou W. X.1,Ngoi B. K. A.1,Yue C. Y.1

Affiliation:

1. The Singapore-MIT Alliance, Innovation in Manufacturing Systems and Technology Program, and School of Mechanical and Production Engineering, Nanyang Technological University, 50 Nanyang Avenue, Singapore

Publisher

American Chemical Society (ACS)

Subject

Materials Chemistry,General Chemical Engineering,General Chemistry

Cited by 17 articles. 订阅此论文施引文献 订阅此论文施引文献,注册后可以免费订阅5篇论文的施引文献,订阅后可以查看论文全部施引文献

1. Nanoscale Fabrication;Microsystems and Nanotechnology;2012

2. Nanoimprint Lithography of Polymers;Polymer Science: A Comprehensive Reference;2012

3. Effect of molecular weight and substrate on silicone segregation from UV resin at plasma polymerized mold interface;Journal of Polymer Science Part B: Polymer Physics;2010-01-12

4. Nanoimprint Lithography – Patterning of Resists Using Molding;Springer Handbook of Nanotechnology;2010

5. Direct Imprinted Conductive Patterns using Nanosilver Colloid-Applied UV Curable Resist;Japanese Journal of Applied Physics;2009-06-22

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