Etch rates and surface chemistry of GaAs and AlGaAs reactively ion etched in C2H6/H2
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.343773
Reference15 articles.
1. Reactive‐ion etching of GaAs and InP using CCl2F2/Ar/O2
2. Reactive ion etching of GaAs and InP using SiCl4
3. GaAs and AlGaAs anisotropic fine pattern etching using a new reactive ion beam etching system
4. Surface Damage on GaAs Induced by Reactive Ion Etching and Sputter Etching
5. Dry Etching and Impurity Diffusion for Integrated Optoelectronics
Cited by 22 articles. 订阅此论文施引文献 订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献
1. Modeling of absolute spatial emission profiles of Townsend discharges at high E/N in methane by a Monte Carlo technique;Czechoslovak Journal of Physics;2006-10
2. Excitation coefficients and cross-sections for electron swarms in methane;New Journal of Physics;2004-07-08
3. Data Bases for Modeling Plasma Devices for Processing of Integrated Circuits;Materials Science Forum;2004-05
4. High ion density dry etching of compound semiconductors;Materials Science and Engineering: B;1996-09
5. Influence of CH4/H2 reactive ion etching on the deep levels of Si-doped AlxGa1−xAs (x=0.25);Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1996-05
1.学者识别学者识别
2.学术分析学术分析
3.人才评估人才评估
"同舟云学术"是以全球学者为主线，采集、加工和组织学术论文而形成的新型学术文献查询和分析系统，可以对全球学者进行文献检索和人才价值评估。用户可以通过关注某些学科领域的顶尖人物而持续追踪该领域的学科进展和研究前沿。经过近期的数据扩容，当前同舟云学术共收录了国内外主流学术期刊6万余种，收集的期刊论文及会议论文总量共计约1.5亿篇，并以每天添加12000余篇中外论文的速度递增。我们也可以为用户提供个性化、定制化的学者数据。欢迎来电咨询！咨询电话：010-8811{复制后删除}0370
www.globalauthorid.com
TOP
Copyright © 2019-2024 北京同舟云网络信息技术有限公司 京公网安备11010802033243号 京ICP备18003416号-3