Anomalous temperature effect of oxidation stacking faults in silicon
Author:
Publisher
AIP Publishing
Subject
Physics and Astronomy (miscellaneous)
Link
http://aip.scitation.org/doi/pdf/10.1063/1.88441
Reference5 articles.
1. Formation of stacking faults and enhanced diffusion in the oxidation of silicon
2. Effect of Crystal Orientation on the Stacking Fault Formation in Thermally Oxidized Silicon
3. Phase transformations of the Si(111) surface
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