Intrinsic stress evolution in laser deposited thin films
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1602565
Reference30 articles.
1. An intrinsic stress scaling law for polycrystalline thin films prepared by ion beam sputtering
2. Stress-related effects in thin films
3. Calculations and experiments of material removal and kinetic energy during pulsed laser ablation of metals
4. Thermalization of sputtered atoms
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