Thermalization of sputtered atoms
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.329473
Reference7 articles.
1. X-ray diffraction study of a one-dimensional GaAs–AlAs superlattice
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5. II. The energy spectrum of ejected atoms during the high energy sputtering of gold
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