Wafer-Scale epitaxial molybdenum disulfide ultrathin film on sapphire prepared by low-energy reactive magnetron sputtering
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Published:2024-06
Issue:
Volume:659
Page:159889
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ISSN:0169-4332
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Container-title:Applied Surface Science
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language:en
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Short-container-title:Applied Surface Science
Author:
Wang Chao-ChinORCID,
Lee Chih-HaoORCID