Real-time monitoring of stress evolution during thin film growth by in situ substrate curvature measurement-Reference-Cited by-同舟云学术

Real-time monitoring of stress evolution during thin film growth by in situ substrate curvature measurement

Published:2019-02-28 Issue:8 Volume:125 Page:082513
ISSN:0021-8979
Container-title:Journal of Applied Physics
language:en
Short-container-title:Journal of Applied Physics

Author:

Gilardi Elisa¹,Fluri Aline¹,Lippert Thomas¹²³,Pergolesi Daniele¹⁴

Affiliation:

1. Research with Neutrons and Muons Division, Paul Scherrer Institut (PSI), 5232 Villigen, Switzerland

2. Department of Chemistry and Applied Biosciences, Laboratory of Inorganic Chemistry, ETH Zürich, Vladimir-Prelog-Weg 1-5/10, 8093 Zürich, Switzerland

3. International Institute for Carbon Neutral Energy Research (WPI-I2CNER), Kyushu University, 744 Motooka, Nishi-ku, Fukuoka 819-0395, Japan

4. Energy and Environment Research Division, Paul Scherrer Institut (PSI), 5232 Villigen, Switzerland

Funder

Schweizerischer Nationalfonds zur Förderung der Wissenschaftlichen Forschung

Publisher

AIP Publishing

Subject

General Physics and Astronomy

Link

http://aip.scitation.org/doi/pdf/10.1063/1.5054092

Reference36 articles.

1. In situ stress observation in oxide films and how tensile stress influences oxygen ion conduction

2. Feel the strain

3. “Stretching” the energy landscape of oxides—Effects on electrocatalysis and diffusion

4. Extreme electronic bandgap modification in laser-crystallized silicon optical fibres

Cited by 13 articles. 订阅此论文施引文献订阅此论文施引文献，注册后可以免费订阅5篇论文的施引文献，订阅后可以查看论文全部施引文献

1. Experimental and ab initio derivation of interface stress in nanomultilayered coatings: Application to immiscible Cu/W system with variable in-plane stress;Applied Surface Science;2024-07

2. Collective formation of misfit dislocations at the critical thickness for equilibrium nanowire heterostructures;Journal of Crystal Growth;2023-11

3. Analytical solutions for film stress and bending deformation of coated optical lenses;International Journal of Mechanical Sciences;2023-05

4. A practical guide to pulsed laser deposition;Chemical Society Reviews;2023

5. Experimental and ab initio Derivation of Interface Stress in Nanomultilayered Coatings: Application to Immiscible Cu/W System with Variable In-Plane Stress;2023