Quantitative electron microprobe analysis of aluminum, copper, and gold thin films on silicon substrates
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1502923
Reference18 articles.
1. Quantitative Electron Microprobe Analysis of Thin Films on Substrates
2. Quantitative electron microprobe analysis of ultrathin gold films on substrates
3. The scattering of fast electrons by atomic nuclei
4. An empirical stopping power relationship for low-energy electrons
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3. PIXE detection limit for aluminium thin film deposited on Si-based matrix;Nuclear Instruments and Methods in Physics Research Section B: Beam Interactions with Materials and Atoms;2017-09
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