Simulation of stress-induced leakage current in silicon dioxides: A modified trap-assisted tunneling model considering Gaussian-distributed traps and electron energy loss
Author:
Publisher
AIP Publishing
Subject
General Physics and Astronomy
Link
http://aip.scitation.org/doi/pdf/10.1063/1.1367399
Reference17 articles.
1. High-field-induced degradation in ultra-thin SiO/sub 2/ films
2. Modeling and simulation of stress-induced leakage current in ultrathin SiO/sub 2/ films
3. Experimental evidence of inelastic tunneling in stress-induced leakage current
4. A new I-V model for stress-induced leakage current including inelastic tunneling
5. Mechanism of stress-induced leakage current in MOS capacitors
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