On-wafer fabrication of etched-mirror UV-C laser diodes with the ALD-deposited DBR-Reference-Cited by-同舟云学术

On-wafer fabrication of etched-mirror UV-C laser diodes with the ALD-deposited DBR

Published:2020-03-23 Issue:12 Volume:116 Page:122101
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Sakai Tadayoshi¹,Kushimoto Maki¹^ORCID,Zhang Ziyi²³^ORCID,Sugiyama Naoharu³,Schowalter Leo J.³⁴^ORCID,Honda Yoshio³⁵,Sasaoka Chiaki³,Amano Hiroshi³

Affiliation:

1. Graduate School of Engineering, Nagoya University, Furo-cho, Chikusa-ku, Aichi 464-8603, Japan

2. Innovative Devices R&D Center, Corporate Research & Development, Asahi Kasei Corporation, Fuji, Shizuoka 416-8501, Japan

3. Center for Integrated Research of Future Electronics, Institute of Materials Research and Systems for Sustainability, Nagoya University, Furo-cho, Chikusa-ku, Aichi 464-8601, Japan

4. Crystal IS, Inc., 70 Cohoes Avenue, Green Island, New York 12183, USA

5. Institute of Advanced Research, Nagoya University, Furo-cho, Chikusa-ku, Aichi 464-8601, Japan

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.5145017

Reference28 articles.

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5. Characterization of 60 mm AlN Single Crystal Wafers Grown by the Physical Vapor Transport Method

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