Increase of the emission of laser-produced plasmas under N2 gas atmosphere in the 2.9

Increase of the emission of laser-produced plasmas under N2 gas atmosphere in the 2.9–6 nm region

Published:2017-07-31 Issue:5 Volume:111 Page:054102
ISSN:0003-6951
Container-title:Applied Physics Letters
language:en
Short-container-title:Appl. Phys. Lett.

Author:

Kado Masataka¹,Kishimoto Maki¹,Shinohara Kunio¹²,Ejima Takeo³^ORCID

Affiliation:

1. Kansai Photon Science Institute, National Institutes for Quantum and Radiological Science and Technology, 8-1-7, Umemidai, Kizugawa 619-0215, Japan

2. School of Engineering, Tokai University, 4-1-1, Kitakaname, Hiratsuka 259-1292, Japan

3. Institute for Multidisciplinary Research for Advanced Materials, Tohoku University, 2-1-1, Katahira, Aoba-ku, Sendai 980-8577, Japan

Funder

Japan Society for the Promotion of Science (JSPS)

Publisher

AIP Publishing

Subject

Physics and Astronomy (miscellaneous)

Link

http://aip.scitation.org/doi/pdf/10.1063/1.4996890

Reference15 articles.

1. Soft X-Rays and Extreme Ultraviolet Radiation

2. Soft x-ray production from laser produced plasmas for lithography applications

3. Enhancement of keV x‐ray emission in laser‐produced plasmas by a weak prepulse laser

4. Performance of new high-power HVM LPP-EUV source

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