Subject
General Physics and Astronomy
Cited by
5 articles.
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1. Precise slit-width control of niobium apertures for superconducting LEDs;Nanotechnology;2010-12-20
2. High etching rates of bulk Nb in Ar/Cl2 microwave discharge;Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films;2009-03
3. Plasma treatment of bulk niobium surface for SRF cavities;Nuclear Instruments and Methods in Physics Research Section A: Accelerators, Spectrometers, Detectors and Associated Equipment;2006-12
4. Electron beam lithography and reactive ion etching of nanometer size features in niobium films;Materials Science and Engineering: C;2001-08
5. Linewidth uniformity versus etch rate uniformity in refractory metal plasma etching;Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures;1994-09